Standard Item You Can Choose
Model
|
Material
|
Coating Type
|
Over size
|
Positive/
Negative
|
Thickness
|
Pattern
|
LTU-025-(0-9,1)-PG
|
Quartz Glass
|
Blue Chrome
|
25x25mm/1"
|
Positive
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-025-(0-9,1)-NG
|
Quartz Glass
|
Blue Chrome
|
25x25mm/1"
|
Negative
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-025-(0-9,6)-PG
|
Quartz Glass
|
Blue Chrome
|
25x25mm/1"
|
Positive
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-025-(0-9,6)-PG
|
Quartz Glass
|
Blue Chrome
|
25x25mm/1"
|
Negative
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-050-(0-9,1)-PG
|
Quartz Glass
|
Blue Chrome
|
50x50mm/2"
|
Positive
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-050-(0-9,1)-PG
|
Quartz Glass
|
Blue Chrome
|
50x50mm/2"
|
Negative
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-050-(0-9,6)-PG
|
Quartz Glass
|
Blue Chrome
|
50x50mm/2"
|
Positive
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-050-(0-9,6)-PG
|
Quartz Glass
|
Blue Chrome
|
50x50mm/2"
|
Negative
|
1.6mm
|
Group 0 Element1 to Group 9 Element1
|
LTU-076-(-2-9,1)-PG
|
Quartz Glass
|
Blue Chrome
|
76x76mm/3"
|
Positive
|
1.6mm
|
Group -2 Element1 to Group 9 Element1
|
LTU-076-(-2-9,1)-PG
|
Quartz Glass
|
Blue Chrome
|
76x76mm/3"
|
Negative
|
1.6mm
|
Group -2 Element1 to Group 9 Element1
|
LTU-076-(-2-9,6)-PG
|
Quartz Glass
|
Blue Chrome
|
76x76mm/3"
|
Positive
|
1.6mm
|
Group -2 Element1 to Group 9 Element1
|
LTU-076-(-2-9,6)-PG
|
Quartz Glass
|
Blue Chrome
|
76x76mm/3"
|
Negative
|
1.6mm
|
Group -2 Element1 to Group 9 Element1
|
Specification
Product Specification | ||||||||
Pattern Info | Substrate Material Info | |||||||
Production Process | Laser Writing | Substrate Material of Glass |
Quartz Glass (Fused Silica) | |||||
Minimum Line/space | 1μm / 0.55μm | Transmission (@550nm) |
>95% | |||||
Feature Accuracy & Avarage Accuracy |
±1μm | Thermal Expansion Coeff (20-200 ℃) |
<5.0x10⁻⁷/K | |||||
Coating Type | Blue Chrome (Low Reflective) | Expansion Ratio (20-200 ℃) |
0.00006%(0.6μm/℃ of 1m) | |||||
Reflectivity | < 13.4% @550nm | Surface Flatness | <0.55μm (Dimension<50mm) | |||||
< 1.8% @650nm | <2μm (Dimension<100mm) | |||||||
< 2.67% @750nm | <5μm (Dimension>100mm) | |||||||
Coating Thickness | 120nm (±0.20nm) | Surface Roughness | <0.025μm | |||||
Optical Density OD | >4.5 | Thickness | 1.6mm (±0.3mm) | |||||
White Background | Minimum Line/space: 10μm, Thickness: 40μm (White & Smooth Coating on the Back Side) |
MIN / MAX Overall Size |
Min: 4x4mm; Max: 800x960mm |
|||||
Positive / Negative |
|
Target Shape | Square |
Number of line pairs per millimeter (lp/mm) in USAF Resolving Power Test Target 1951 | ||||||||||||
Group Number | ||||||||||||
Element | -2 | -1 | 0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
1 | 0.250 | 0.500 | 1.00 | 2.00 | 4.00 | 8.00 | 16.00 | 32.0 | 64.0 | 128.0 | 256.0 | 512.0 |
2 | 0.281 | 0.561 | 1.12 | 2.24 | 4.49 | 8.98 | 17.96 | 35.9 | 71.8 | 143.7 | 287.4 | 574.7 |
3 | 0.315 | 0.630 | 1.26 | 2.52 | 5.04 | 10.08 | 20.16 | 40.3 | 80.6 | 161.3 | 322.5 | 645.1 |
4 | 0.354 | 0.707 | 1.41 | 2.83 | 5.66 | 11.31 | 22.63 | 45.3 | 90.5 | 181.0 | 362.0 | 724.1 |
5 | 0.397 | 0.794 | 1.59 | 3.17 | 6.35 | 12.70 | 25.40 | 50.8 | 101.6 | 203.2 | 406.4 | 812.7 |
6 | 0.445 | 0.891 | 1.78 | 3.56 | 7.13 | 14.25 | 28.51 | 57.0 | 114.0 | 228.1 | 456.1 | 912.3 |
Width of a line in micrometers(μm) in USAF Resolving Power Test Target 1951 | ||||||||||||
Group Number | ||||||||||||
Element | -2 | -1 | 0 | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
1 | 2000.00 | 1000.00 | 500.00 | 250.00 | 125.00 | 62.50 | 31.25 | 15.63 | 7.81 | 3.91 | 1.95 | 0.98 |
2 | 1781.80 | 890.90 | 445.45 | 222.72 | 111.36 | 55.68 | 27.84 | 13.92 | 6.96 | 3.48 | 1.74 | 0.87 |
3 | 1587.40 | 793.70 | 396.85 | 198.43 | 99.21 | 49.61 | 24.80 | 12.40 | 6.20 | 3.10 | 1.55 | 0.78 |
4 | 1414.21 | 707.11 | 353.55 | 176.78 | 88.39 | 44.19 | 22.10 | 11.05 | 5.52 | 2.76 | 1.38 | 0.69 |
5 | 1259.92 | 629.96 | 314.98 | 157.49 | 78.75 | 39.37 | 19.69 | 9.84 | 4.92 | 2.46 | 1.23 | 0.62 |
6 | 1122.46 | 561.23 | 280.62 | 140.31 | 70.15 | 35.08 | 17.54 | 8.77 | 4.38 | 2.19 | 1.10 | 0.55 |